Nanomaterials @ Interfaces Research Group

Prof. Yuval Golan's Research Group

Substrate reactivity and "controlled contamination" in metalorganic chemical vapor deposition of GaN on sapphire

Yuval Golan, Paul Fini, Steven P. DenBaars, James S. Speck

Atomic force microscopy (AFM) and lateral force microscopy (LFM) have been used to study the effect of common substrate surface pretreatments on the metalorganic chemical vapor deposition (MOCVD) of GaN on sapphire. It appears that contaminants play a major role in the surface chemistry and strongly influence the morphology of the treated surfaces. To investigate the role of these contaminants, we have introduced the concept of "controlled contamination" (CC), namely, exposure of the sapphire surfaces to controlled amounts of potential contaminants and investigation of the resulting sapphire morphology. The results showed that sapphire, considered to be a very stable oxide surface, is clearly reactive under typical conditions employed in the high-temperature MOCVD growth of GaN.

Publication language English
Pages 4695-4703
Volume 37
Issue number 9 A
Publication status Published - 01.01.1998

Keywords

AFM
Controlled contamination
GaN
Lateral force microscopy
MOCVD
Sapphire
Substrate reactivity
Surface pretreatments

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy
Access to Document
10.1143/jjap.37.4695
Other files and links
Link to publication in Scopus