
ELECTRO-OPTICS LABORATORY
Department of Electrical and Computer Engineering
Synthetic spatial coherence function for optical tomography and profilometry
Influence of the observation condition
We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.
| Publication language | English |
| Pages | 236-243 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5531 |
| Publication status | Published - 01.12.2004 |
| 27 |
Keywords
Coherence control
Observation condition
Optical tomography
Profilometry
Spatial coherence
ASJC Scopus subject areas
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering