ELECTRO-OPTICS  LABORATORY

Department of Electrical and Computer Engineering

Synthetic spatial coherence function for optical tomography and profilometry

Influence of the observation condition

Zhihui Duan, Hirokazu Kozaki, Yoko Miyamoto, Joseph Rosen, Mitsuo Takeda

We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.

Publication language English
Pages 236-243
Journal Proceedings of SPIE - The International Society for Optical Engineering
Volume 5531
Publication status Published - 01.12.2004
27

Keywords

Coherence control
Observation condition
Optical tomography
Profilometry
Spatial coherence

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering
Access to Document
10.1117/12.559139
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Link to publication in Scopus