ELECTRO-OPTICS LABORATORY
Department of Electrical and Computer Engineering
Synthetic spatial coherence function for optical tomography and profilometry
Simultaneous realization of longitudinal coherence scan and phase shift
A new scheme for synthesizing three-dimensional longitudinal spatial coherence function is proposed. By manipulating the irradiance of an extended quasi-monochromatic spatially incoherent source with a spatial light modulator, we generated a special optical field that exhibits high coherence selectively for the specified location along the optical axis of propagation and for the specified inclination between the two mirrors in the interferometer. The feasibility of the proposed principle is demonstrated by measuring a step height made by standard gauge blocks. The proposed scheme permits one to perform phase shift without recourse to mechanical movement. The quantitative experimental proof of the principle is presented.
| Publication language | English |
| Pages | 110-117 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4777 |
| Publication status | Published - 01.01.2002 |
Keywords
Coherence theory
Interferometry
Optical metrology
Optical tomography
Phase shift technique
Profilometry
Spatial coherence
Spatial light modulator
The fringes of equal thickness
ASJC Scopus subject areas
Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering
