ELECTRO-OPTICS  LABORATORY

Department of Electrical and Computer Engineering

An improved illumination system for spatial coherence control

Zhiqiang Liu, Takeshi Gemma, Joseph Rosen, Mitsuo Takeda

A longitude coherence control system needs a source that is temporally coherent and yet spatially incoherent. For this reason, a zone plate-like pattern is imaged onto a rotating ground glass. Generally the ground glass exhibits a strong directivity. It is far from an ideal uniform diffuser that is implicitly assumed in the theory. To solve this problem, we propose a new illumination system. In our system, the beam illuminating the zone plate-like pattern is focused on the test surface. We measured the longitudinal coherence functions in our optical system. The result shows that the longitude coherent function is better controlled in our interferometer.

Publication language English
Pages 220-227
Journal Proceedings of SPIE - The International Society for Optical Engineering
Volume 5531
Publication status Published - 01.12.2004
25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering
Access to Document
10.1117/12.560350
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Link to publication in Scopus