ELECTRO-OPTICS  LABORATORY

Department of Electrical and Computer Engineering

Imaging Beyond Lithography and Wavelength Limits Using Self-Interference Holography

Andrei Bleahu, Shivasubramanian Gopinath, Tauno Kahro, Soon Hock Ng, Kaupo Kukli, Aile Tamm, Saulius Juodkazis, Joseph Rosen, Vijayakumar Anand
Manufacturing diffractive lenses with a high Numerical Aperture (NA) is a challenging task due to limitations in lithography methods and the inverse relation between the width and the radius of the zones. With low-resolution lithography techniques such as photolithography, the zone width reaches the lithography limit within a short radius, resulting in low-NA diffractive lenses. With high-resolution electron beam lithography, it is possible to manufacture high-NA diffractive lenses by prolonged writing. However, in this case, the width of the outermost zones becomes subwavelength, inducing undesirable polarization effects. In this proof-of-concept study, a computational imaging solution has been demonstrated to enhance the imaging resolution of low-NA diffractive lenses. The light from an object is partly modulated by the low-NA diffractive lens and interferes with the remaining unmodulated light outside the area of the diffractive lens. This self-interference hologram of the object is processed in the computer with the point spread hologram to reconstruct the object with a resolution corresponding to the NA of the image sensor. This new imaging technique is called Self-Wavefront Interference using Transverse Splitting Holography (SWITSH). A resolution enhancement of ~10 times has been demonstrated using a low-NA diffractive lens and SWITSH compared to direct imaging with the same low-NA diffractive lens.
Publication language English
Publication status Published - 11.04.2023

Keywords

Super resolution
self-interference
holography
Lucy-Richardson-Rosen algorithm
photolithography
diffractive lens
Access to Document
10.2139/ssrn.4415921