
Applied Nanophotonics, Liquid Crystals and Biomedical Optics
Prof. Ibrahim Abdulhalim Research Group
Method for the measurement of multi-layers refractive indices and thicknesses using interference microscopes with annular aperture
A new method is proposed for simultaneous determination of thicknesses and refractive indices of multi-layers using double beam interference microscopes with centrally obscured or annulus aperture lens. The method is based on the fact that for centrally obscured apertures with high obstruction ratio (>0.9), the light angular spread is limited to a narrow interval, thus allowing for determination of the thicknesses and refractive indices using simple analytic expressions. It comprises of axial scanning for best interferogram contrast and subsequent path length scanning for best symmetry of the interferogram. With spectral scanning the absorption coefficients can also be determined using Kramers-Kroning relations.
| Publication language | English |
| Pages | 476-478 |
| Volume | 110 |
| Issue number | 10 |
| Publication status | Published - 01.12.1999 |
ASJC Scopus subject areas
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering