Lithography Process Equipment ​

Hot Plates​

​Center Hot plate instructions​​

Left Hot plate instructions

Right Hot pl​ate ​instructions

​​​​​​Tool owner- Amit Yosefi ; ​Tel: 08-6479812;  email: amityos@bgu.ac.ill

Spinners​

Prog​raming the spin​ners​

​Chuck inspection protocol​

Tool owner- Amit Yosefi ; ​Tel: 08-647​​9812; email: amityos@bgu.ac.il

Electron Beam Lythography​

EBPG5150

EBPG Safety and Work Protocol

​​​​​​Tool owner- Asi Solodar ; ​Tel: 08-6479446; email: asisolo@bgu.ac.il

Maskless Aligner MLA-150

MLA-150 ​

MLA-150 Safety and Work Protocol

MLA-150 User Guide ​

Tool owner-Amit Yosefi​ ; ​Tel: 08-647​​9812​; email: amityos@post.bgu.ac.il

Mask Alig​ner

​Mask Aligne​r MA6​​

Mask Aligner Manual

Mask Aligner work protocol

Tool owner- Alex Kozlovski​ ; ​Tel: 08-6479384​; email: kozalex@bgu.ac.il​