Etching

Deep Silicon Etching (DSiE)- Oxford Estrelas​

​Estrelas Description​

Estrelas Manual​

Safety and work protocol Estrelas

​​​​​​Tool owner- Nadav Aharon ; ​Tel: 08-6479811; email:​ nadavah@bgu.ac.il

Deep Rea​​​​​ctive-Ion Etching (DRIE)- Oxford Cobra

Cobra Desc​ription​​

​Cobra Manual​

Safety and work protocol Cobra

​​​​​​Tool owner- Nadav Aharon ; ​Tel: 08-6479811; email:​ nadavah@bgu.ac.il

Ion Beam Milling (IBM)​

IBM Description​​

​IBM Manual

Tool owner- Amit Yosefi ; ​Tel: 08-6479812; email: amityos@bgu.ac.il​

Xactix e1​

​Xactix ​description​

​​​​​​Tool owner- Nadav Aharon ; ​Tel: 08-6479811; email:​ nadavah@bgu.ac.il