Deposition Process Equipment

ICP-CVD

Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD)

Tool owner- Nadav Aharon​ ; ​Tel: 08-6479811; email: nadavah@bgu.ac.il

CVD/L​PCVD

Chemical Vapor Deposition (CVD)/ Low Pressure Chemical Vapor Deposition (LPCVD)

CTR 125 Operating Manual

Tool owner- Andrey Yurec​henko​ ; ​Tel: 08-6428724; email: andreyyu@bgu.ac.il

E.B. Gun - ODEM​

E-gun ODEM manual

Tool owner- Alex Kozlovski​ ; ​Tel: 08-6479384; email: kozalex@bgu.ac.il

E.B. Gun - VST

VST work Protocol+Manual​

Training protocol on vst system

VST in-depth manual

Tool owner- Alex Kozlovski​ ; ​Tel: 08-6479384; email: kozalex@bgu.ac.il​

AJA- Sputter

Sputter deposition: AJA - sputter orion-8-UHV

AJA sputter Safety and Work Protocol

AJA sputter Manual.docx

Tool owner- Nadav Aharon​ ; ​Tel: 08-6479811; email: nadavah@bgu.ac.il

​E.B. Gun deposition

AJA - ATC-2036-E-T

Training protocol on AJA system

​​Tool owner- Alex Kozlovski​ ; ​Tel: 08-6479384 email: kozalex@bgu.ac.il​

ALD depos​ition

ALD deposition ARRADIANCE - GemStar ALD​

ALD user manual

Tool owner- Andrey Yurec​henko​ ; ​Tel: 08-6428724 ; email: andreyyu@bgu.ac.il